CAS 205503-61-3 N,N,N-Tri-tert-butylsilanetriamine

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Vapor Deposition Precursors

N,N,N-Tri-tert-butylsilanetriamine

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Catalog Number

ACM205503613

Product Name

N,N,N-Tri-tert-butylsilanetriamine

Structure

CAS

205503-61-3

Category

Vapor Deposition Precursors

Synonyms

N,N,N-TRI-TERT-BUTYLSILANETRIAMINE;TRI-T-BUTYLAMINOSILANE;99,0%;TRI-TERT-BUTYLAMINOSILANE;452.2;C10H12N2O8Na4.4H₂O;N,N,N-Tri-t-Butylsilanetriamine;N,N,N-Tri-tert-butylsilanetriamine 99.99% trace metals basis

Molecular Weight

244.47g/mol

Molecular Formula

C12H30N3Si

Canonical SMILES

CC(C)(C)N[Si](NC(C)(C)C)NC(C)(C)C

InChI

InChI=1S/C12H30N3Si/c1-10(2,3)13-16(14-11(4,5)6)15-12(7,8)9/h13-15H,1-9H3

InChI Key

LBFNBHQPKWSWMM-UHFFFAOYSA-N

Complexity

170