CAS 70969-29-8 Bis(trimethylsilyl)amidohafnium(iv)chloride

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Bis(trimethylsilyl)amidohafnium(iv)chloride

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Catalog Number

ACM70969298-2

CAS Number

70969-29-8

Product Name

Bis(trimethylsilyl)amidohafnium(iv)chloride

Structure

Category

Vapor Deposition Precursors

Synonyms

HAFNIUM BIS(HEXAMETHYLDISILAZIDE)DICHLORIDE;BIS(TRIMETHYLSILYL)AMIDOHAFNIUM(IV) CHLORIDE;Bis(trimethylsilyl)amidohafnium(IV) chloride, >=95%, 99.99+% metals basis

Molecular Weight

570.17

Molecular Formula

C₁₂H₃₆Cl₂HfN₂Si₄

MSDS

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COA

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Spec Sheet

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