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Bis(trimethylsilyl)amidohafnium(iv)chloride

Catalog Number
ACM70969298-2
CAS Number
70969-29-8
Product Name
Bis(trimethylsilyl)amidohafnium(iv)chloride
Structure
Category
Vapor Deposition Precursors
Synonyms
HAFNIUM BIS(HEXAMETHYLDISILAZIDE)DICHLORIDE;BIS(TRIMETHYLSILYL)AMIDOHAFNIUM(IV) CHLORIDE;Bis(trimethylsilyl)amidohafnium(IV) chloride, >=95%, 99.99+% metals basis
Molecular Weight
570.17
Molecular Formula
C12H36Cl2HfN2Si4
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