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Bis(trimethylsilyl)amidohafnium(iv)chloride

Catalog NumberACM70969298-2

CAS Number70969-29-8

CategoryVapor Deposition Precursors

Bis(trimethylsilyl)amidohafnium(iv)chloride
Synonyms
HAFNIUM BIS(HEXAMETHYLDISILAZIDE)DICHLORIDE;BIS(TRIMETHYLSILYL)AMIDOHAFNIUM(IV) CHLORIDE;Bis(trimethylsilyl)amidohafnium(IV) chloride, >=95%, 99.99+% metals basis
Molecular Weight
570.17
Molecular Formula
C12H36Cl2HfN2Si4
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