Product Name
2,4,6,8-Tetramethylcyclotetrasiloxane
Category
Salt; Vapor Deposition Precursors
Synonyms
1,2,5,7-Tetramethylcyclotetrasiloxane
Description
Atomic number of base material: 14 Silicon
Molecular Formula
C4H16O4Si4
Canonical SMILES
C[Si]1O[Si](O[Si](O[Si](O1)C)C)C
InChI
InChI=1S/C4H12O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h1-4H3
InChI Key
WZJUBBHODHNQPW-UHFFFAOYSA-N
Density
0.986 g/mL at 25 °C (lit.)
Solubility
Miscible with most organic solvents
Appearance
Colorless liquid
Application
2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications
Covalently-Bonded Unit Count
1
Hazard Statements
H319 : Causes serious eye irritation.
H226 : Flammable liquid and vapour.
Monoisotopic Mass
235.981265
Precautionary Statements
P210 : Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking.
P280 : Wear protective gloves/ protective clothing/ eye protection/ face protection.
P370 + P378 : In case of fire: Use dry sand, dry chemical or alcohol-resistant foam to extinguish.
P337 + P313 : If eye irritation persists: Get medical advice/ attention.
P303 + P361 + P353 : IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water.
P403 + P235 : Store in a well-ventilated place. Keep cool.
Topological Polar Surface Area
36.9 Ų