CAS 2081-12-1 Zirconium(IV) tert-butoxide - Materials / Alfa Chemistry

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Solution Deposition Precursors

Zirconium(IV) tert-butoxide

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Catalog Number

ACM2081121-1

Product Name

Zirconium(IV) tert-butoxide

Structure

CAS

2081-12-1

Category

Solution Deposition Precursors

Synonyms

Tetrakis(tert-butanolato)zirconium

IUPAC Name

2-Methylpropan-2-ol;zirconium

Molecular Weight

387.71

Molecular Formula

C16H40O4Zr

Canonical SMILES

CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]

InChI

InChI=1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;

InChI Key

WRMYASGYMABHCC-UHFFFAOYSA-N

Melting Point

3 °C

Flash Point

185 °F

Purity

95%+

Density

0.985 g/mL at 25 °C (lit.)

Appearance

Slightly yellow liquid

Application

Zirconium tert-butoxide (ZTB) precursor is used to deposit thin films of Zirconia and other zirconium containing films by atomic layer deposition and chemical vapor deposition methods. Zirconium oxide thin films can also be grown at low temperatures, ranging from 150°C to 300°C, by the presence of moisture along with ZTB or by UV-enhanced atomic layer deposition (UV-ALD) process.

Storage

2-8 °C

Complexity

154

Covalently-Bonded Unit Count

Exact Mass

386.197359

Form

liquid

Formal Charge

Heavy Atom Count

Hydrogen Bond Acceptor Count