CAS 13801-49-5 Tetrakis(diethylamino)zirconium

NAVIGATION

Tetrakis(diethylamino)zirconium

PRICE INQUIRY

Catalog Number

ACM13801495-1

CAS Number

13801-49-5

Product Name

Tetrakis(diethylamino)zirconium

Structure

Category

Vapor Deposition Precursors

Synonyms

Zirconium diethylamide

IUPAC Name

Diethylazanide;zirconium(4+)

Molecular Weight

379.74

Molecular Formula

C16H40N4Zr

Canonical SMILES

CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC.[Zr+4]

InChI

InChI=1S/4C4H10N.Zr/c4*1-3-5-4-2;/h4*3-4H2,1-2H3;/q4*-1;+4

InChI Key

GOVWJRDDHRBJRW-UHFFFAOYSA-N

Boiling Point

128 °C/0.05mmHg (lit.)

Flash Point

54 °F

Purity

95%+

Density

1.026 g/mL at 25 °C (lit.)

Appearance

Yellow liquid

Application

Tetrakis(diethylamino)zirconium serves as a versatile precursor in various applications. It is primarily utilized in the deposition of ZrN and ZrO2 films, which are crucial for developing thin film ferroelectric materials through chemical vapor deposition (CVD). Additionally, it plays a significant role in producing zirconium complexes that act as catalytic precursors for organic chemical reactions. Moreover, Tetrakis(diethylamino)zirconium is instrumental in the deposition of ZrN films using the remote plasma-enhanced atomic layer deposition method, and it is an essential component in the production of olefin polymers.

Storage

2-8 °C

Complexity

74.3

Covalently-Bonded Unit Count

Exact Mass

378.229996

Formal Charge

Heavy Atom Count

Monoisotopic Mass

378.229996

Refractive Index