Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium

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Vapor Deposition Precursors

Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium

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Catalog Number

ACMA00016297

Product Name

Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium

Category

Vapor Deposition Precursors

Synonyms

ZRCMMM,
ZrD-CO4

Description

Atomic number of base material: 40 Zirconium

Molecular Weight

295.53

Molecular Formula

Zr(CH3C5H4)2CH3OCH3

Canonical SMILES

C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC

InChI

1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1,LFGIFPGCOXPKMG-UHFFFAOYSA-N

InChI Key

LFGIFPGCOXPKMG-UHFFFAOYSA-N

Application

Precursors Packaged for Depositions Systems

Storage

room temp

Form

liquid

MDL Number

MFCD16875687

Packaging

10 g in stainless steel cylinder,Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

MSDS

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COA

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Spec Sheet

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