Catalog Number
ACM511292992
Product Name
Tris(ethylmethylamido)(tert-butylimido)tantalum(V)
Category
Vapor Deposition Precursors
Synonyms
(t-Butylimido)tris(ethylmethylamino)tantalum(V)
Description
Atomic number of base material: 73 Tantalum
IUPAC Name
Tert-butyliminotantalum;ethyl(methyl)azanide
Molecular Formula
C13H33N4Ta
Canonical SMILES
CC[N-]C.CC[N-]C.CC[N-]C.CC(C)(C)N=[Ta]
InChI
InChI=1S/C4H9N.3C3H8N.Ta/c1-4(2,3)5;3*1-3-4-2;/h1-3H3;3*3H2,1-2H3;/q;3*-1;
InChI Key
WUOSVSDQERJZBI-UHFFFAOYSA-N
Density
1.323 g/mL at 21 °C (lit.)
Monoisotopic Mass
426.21852
Safety Description
26-36/37/39-43-45
Topological Polar Surface Area
15.4 Ų