CAS 3555-47-3 Tetrakis(Trimethylsiloxy)Silane

NAVIGATION

Tetrakis(Trimethylsiloxy)Silane

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Catalog Number

ACM3555473-5

CAS Number

3555-47-3

Product Name

Tetrakis(Trimethylsiloxy)Silane

Category

Salt

Synonyms

Tetrakis-trimethylsilyloxy-silan; Tetrakis(trimethylsiloxy)silane; 1,1,1,5,5,5-hexamethyl-3,3-bis-trimethylsilanyloxy-trisiloxane; Tetrakis-trimethylsiloxy-silan; 3.3-Bis-trimethylsiloxy-hexamethyltrisiloxan; Orthokieselsaeure-tetrakis-trimethylsilylester; 1,1,1,5,5,5-Hexamethyl-3,3-bis-trimethylsilyloxy-trisiloxan;

IUPAC Name

tetrakis(trimethylsilyl)silicate

Molecular Weight

384.84 g/mol

Molecular Formula

C12H36O4Si5

Canonical SMILES

C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C

InChI Key

VNRWTCZXQWOWIG-UHFFFAOYSA-N

Boiling Point

284.4 °C(760 mmHg)

Melting Point

-60 °C

Flash Point

117.4 °C

Purity

0.98

Density

0.893 g/mL

Appearance

Transparent liquid

Application

Tetrakis(trimethylsiloxy)silane, a colorless liquid, serves as an essential organosilicon compound employed in the preparation of nanostructured organosilicon polymer films through plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. Additionally, it is utilized in the synthesis of low dielectric constant SiCOH films when combined with cyclohexane using the PECVD method.

Storage

Ambient temperatures.

EC Number

222-613-4

Exact Mass

384.14600

Hazard Statements

Xi: Irritant;

Packaging

10 g; 100 g;

Safety Description

26-36