CAS 6074-84-6 Tantalum(V) ethoxide - Materials / Alfa Chemistry

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Solution Deposition Precursors

Tantalum(V) ethoxide

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Catalog Number

ACM6074846

Product Name

Tantalum(V) ethoxide

Structure

CAS

6074-84-6

Category

Solution Deposition Precursors

Synonyms

PET,Pentaethoxytantalum,Pentaethyl tantalate,Tantalum pentaethoxide

IUPAC Name

ethanolate;tantalum(5+);

Molecular Weight

406.25

Molecular Formula

Ta(OC2H5)5

Canonical SMILES

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5,HSXKFDGTKKAEHL-UHFFFAOYSA-N

InChI Key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

Melting Point

21 °C (lit.)

Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Storage

2-8°C

Complexity

2.8

Covalently-Bonded Unit Count

EC Number

228-010-2

Exact Mass

406.118g/mol

Form

liquid

Heavy Atom Count