CAS 2172-02-3 Hafnium(IV) tert-butoxide - Materials / Alfa Chemistry

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Solution Deposition Precursors

Hafnium(IV) tert-butoxide

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Catalog Number

ACM2172023-1

Product Name

Hafnium(IV) tert-butoxide

Structure

CAS

2172-02-3

Category

Solution Deposition Precursors

Synonyms

Hafnium tetra-t -butoxide,Hafnium tetrakis(t -butoxide),Tetra-t -butoxyhafnium,Tetrakis(t -butoxy)hafnium

IUPAC Name

hafnium(4+);2-methylpropan-2-olate

Molecular Weight

470.94

Molecular Formula

Hf[OC(CH3)3]4

Canonical SMILES

CC(C)(C)O[Hf](OC(C)(C)C)(OC(C)(C)C)OC(C)(C)C

InChI

1S/4C4H9O.Hf/c4*1-4(2,3)5;/h4*1-3H3;/q4*-1;+4,WZVIPWQGBBCHJP-UHFFFAOYSA-N

InChI Key

WZVIPWQGBBCHJP-UHFFFAOYSA-N

Application

Hafnium tert-butoxide [Hf(OtBu)4] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.

Storage

room temp

Complexity

25.1

Covalently-Bonded Unit Count

Exact Mass

472.20792g/mol

Form

liquid

Formal Charge

Heavy Atom Count

MDL Number