Catalog Number
ACMA00016297
Product Name
Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium
Category
Vapor Deposition Precursors
Description
Atomic number of base material: 40 Zirconium
Molecular Formula
Zr(CH3C5H4)2CH3OCH3
Canonical SMILES
C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC
InChI
1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1,LFGIFPGCOXPKMG-UHFFFAOYSA-N
InChI Key
LFGIFPGCOXPKMG-UHFFFAOYSA-N
Application
Precursors Packaged for Depositions Systems
Packaging
10 g in stainless steel cylinder,Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.