2-Ethyl-2-methacryloyloxyadamantane (stabilized with MEHQ)

Name: 2-Ethyl-2-methacryloyloxyadamantane (stabilized with MEHQ)
SKU: ACM209982569-1
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Catalog NumberACM209982569-1

CAS Number209982-56-9

CategoryMonomers; Polymers

2-Ethyl-2-methacryloyloxyadamantane (stabilized with MEHQ)

IUPAC Name

(2-ethyl-2-adamantyl) 2-methylprop-2-enoate

Molecular Weight

248.36g/mol

Molecular Formula

C16H24O2

Canonical SMILES

CCC1(C2CC3CC(C2)CC1C3)OC(=O)C(=C)C

InChI

InChI=1S/C16H24O2/c1-4-16(18-15(17)10(2)3)13-6-11-5-12(8-13)9-14(16)7-11/h11-14H,2,4-9H2,1,3H3

InChI Key

DCTVCFJTKSQXED-UHFFFAOYSA-N

Application

2-Ethyl-2-methacryloyloxyadamantane (stabilized with MEHQ) is primarily used as a monomer in the synthesis of specialized compounds, serving an essential role in the development of photoresist materials. These materials are crucial in advanced lithographic processes, such as 193 nm or EUV lithography, where they enable precise patterning required in semiconductor manufacturing. The monomer is instrumental in crafting PAG-bound polymer resists, such as HS-EA-PAG and GB-EA-PAG, by reacting with hydroxystyrene (HOST) or γ-butyrolactone methacrylate (GBLMA), thus meeting the exacting standards of modern photolithography.

Complexity

355

Covalently-Bonded Unit Count

Exact Mass

248.17763g/mol

Formal Charge

Heavy Atom Count

Monoisotopic Mass

248.17763g/mol

Rotatable Bond Count

XLogP3

4.2